| Overview |
”Automatic foreign particle analysis of multi-area using the Macro Function”
 Metal particles dispersed on 33 stubs were analyzed as pseudo foreign particles using “Macro Function” software. SEM images of 3X4 fields in the central area of 5 mm square on each stub were automatically captured. Number of particles, maximum dimension, and aspect ratio of each particle on acquired 396 BSE images were automatically measured with an image analysis software, Image-Pro.
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