| Overview |
”3D Analysis of Metallic Foreign Substances Collected on Filters”
 Foreign particles collected on a φ 47 mm filter were analayzed using SEM-EDX and Nano 3D Optical Interferomer. Particles on the whole filter were automatically detected and analyzed by SEM-EDX. One particle consisting of Fe and Cr was then three dimensionally visualized by Nano 3D Optical Interferomer. Its maximum height turned out to be 8.13 μm.
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