Hitachi

サイト名称 日立ハイテク

Title Same Area Observation of Graphene on SiO2 with the SEM-AFM Linkage
Details HTD-AFM-E010
Overview At present, the research in graphene related material science and of next generation device applications is very energetic. We observed graphene by using a low acceleration voltage SEM. However, what exactly the black island and line structures in the SEM image of figure 1 represent cannot be identified completely by only using SEM. As AFM, on the contrary, can measure atomic resolution with high accuracy and electric properties it may explain the observation results of SEM.
Product type ・Field Emission Scanning Electron Microscopes (FE-SEM)
・Atomic Force Microscopes (AFM)
Field 1 Materials science
Field 2 Nanomaterials / Catalysts / Battery materials / Composite materials / Crystals
Information type Technical Note
Issue date 2018/01/29
Inquiry Inquiry
No. HTD-AFM-E010