Hitachi

サイト名称 日立ハイテク

Title High quality lamella preparation of Al2O3 using NX2000
Details HTD-FIB-E006
Overview “High quality lamella preparation of Al2O3 using NX2000”

High quality lamella of Al2O3 single crystal was prepared for high resolution TEM imaging. Damages remaining after 2kV FIB processing were almost removed by additional 1kV argon ion milling to clearly show crystal lattice fringes.

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Product type ・Focused Ion Beam Systems (FIB)
・Electron Microscopes (SEM/TEM/STEM)
Field 1 Materials science
Field 2 Glass / Ceramics / Minerals / Biominerals
Information type Technical Note
Issue date 2016/09/20
Inquiry Inquiry
No. HTD-FIB-E006