Overview |
”High contrast imaging of SiC power device dopant profile with SU8200”
A cross section of SiC power device was prepared using FIB and ion milling. While the section prepared with only FIB did not show enough contrast, additional Ar ion milling enabled high-contrast observation of dopant layers.
Further details can be found on our membership website. We would appreciate your joining. About our membership site, see https://www.hitachi-hightech.com/global/en/support/sinavi/ |