Hitachi

サイト名称 日立ハイテク

Title Low damage TEM sample preparation of metallic material using NX2000
Details HTD-FIB-E004
Overview “Low damage TEM sample preparation of metallic material using NX2000”

Clean and less damaged zirconium lamella was prepared using triple beam system, FIB-SEM with incorporated argon ion column. While significant FIB-induced damages were recognized after FIB processing, they were drastically reduced after 1kV argon ion milling to clearly reveal the metallographic texture. 

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Product type ・Focused Ion Beam Systems (FIB)
・Electron Microscopes (SEM/TEM/STEM)
Field 1 Materials science
Field 2 Metals / Magnetic materials
Information type Technical Note
Issue date 2016/10/07
Inquiry Inquiry
No. HTD-FIB-E004