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Title EBSD Analysis of the non-conductive specimen using the low vacuum
Details HTD-SEM-E022
Overview “EBSD Analysis of the non-conductive specimen using the low vacuum”

Cross sectional EBSD analysis of non-conductive ceramics was performed under high vacuum and low vacuum conditions. While charging caused drift and intensity variation in high vacuum, low vacuum of 30 Pa mitigated charging to enable precise crystal orientation analysis.

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Product type ・Field Emission Scanning Electron Microscopes (FE-SEM)
・Scanning Electron Microscopes (SEM)
・Sample Preparation Devices for TEM/SEM
Field 1 Materials science
Field 2 Glass / Ceramics / Minerals / Biominerals
Information type Technical Note
Issue date 2016/12/05
Inquiry Inquiry
No. HTD-SEM-E022