Hitachi

サイト名称 日立ハイテク

Title Lamella preparation of 3D NAND flash memory using double tilt system
Details HTD-FIB-E018
Overview Lamella preparation of 3D NAND flash memory using double tilt system
Product type ・Focused Ion Beam Systems (FIB)
・Electron Microscopes (SEM/TEM/STEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Note
Issue date 2017/01/22
Inquiry Inquiry
No. HTD-FIB-E018