Title	Low Damage TEM sample Preparation of Silicon Semiconductor “FinFET” Using NX200…
Details	HTD-FIB-E019
Overview	Low Damage TEM sample Preparation of Silicon Semiconductor “FinFET” Using NX2000.
Product type	・Focused Ion Beam Systems (FIB) ・Electron Microscopes (SEM/TEM/STEM)
Field 1	Materials science
Field 2	Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type	Technical Note
Issue date	2017/01/22
Inquiry	Inquiry
No.	HTD-FIB-E019

Title

Low Damage TEM sample Preparation of Silicon Semiconductor “FinFET” Using NX200…

Details

HTD-FIB-E019

Overview

Low Damage TEM sample Preparation of Silicon Semiconductor “FinFET” Using NX2000.

Product type

・Focused Ion Beam Systems (FIB)
・Electron Microscopes (SEM/TEM/STEM)

Field 1

Materials science

Field 2

Semiconductors (incl. materials) / Devices / Components / Displays & Lighting

Information type

Technical Note

Issue date

2017/01/22

Inquiry

No.

HTD-FIB-E019

Fields

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Applications：Low Damage TEM sample Preparation of Silicon Semiconductor “FinFET” Using NX200…