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Title Introduction of sample orientation control method using NX2000 -For backside FIB
Details HTD-FIB-E020
Overview “Introduction of sample orientation control method using NX2000 -For backside FIB milling-”

To avoid curtaining effect during TEM sample preparation, sample orientation with respect to the incident beam is optimized for the sample structure using probe rotation and stage rotation. Here, the sample was flipped upside down for backside FIB processing.

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Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Note
Issue date 2017/04/15
Inquiry Inquiry
No. HTD-FIB-E020