||Introduction of sample orientation control method using NX2000 －For backside FIB
||“Introduction of sample orientation control method using NX2000 －For backside FIB milling－”
To avoid curtaining effect during TEM sample preparation, sample orientation with respect to the incident beam is optimized for the sample structure using probe rotation and stage rotation. Here, the sample was flipped upside down for backside FIB processing.
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||Focused Ion Beam Systems (FIB)
||Semiconductors (incl. materials) / Devices / Components / Displays & Lighting