Hitachi

サイト名称 日立ハイテク

Title Reduction of curtaining effect using 180° sample posture shifting method of NX2…
Details HTD-FIB-E022
Overview Reduction of curtaining effect using 180° sample posture shifting method of NX2000 FIB-SEM Triple Beam
Product type ・Focused Ion Beam Systems (FIB)
・Electron Microscopes (SEM/TEM/STEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Note
Issue date 2017/04/15
Inquiry Inquiry
No. HTD-FIB-E022