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Title Observation of damaged layer in Fe single crystal
Details HTD-FIB-E034
Overview “Observation of damaged layer in Fe single crystal”

Damaged layer generated during TEM lamella preparation was evaluated for a metallic material, Fe single crystal, using FIB-SEM-Ar triple beam system. While damaged layer decreased as FIB accelerating voltage went down, 1 kV Ar ion milling finally reduced the damaged layer down to about 3 nm.

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Related links (products)
Product type ・Focused Ion Beam Systems (FIB)
・Transmission Electron Microscopes (TEM)
Field 1 Materials science
Field 2 Metals / Magnetic materials
Information type Technical Data / Data Sheet
Issue date 2018/04/24
Inquiry Inquiry
No. HTD-FIB-E034