|Observation of damaged layer in Fe single crystal
|“Observation of damaged layer in Fe single crystal”
Damaged layer generated during TEM lamella preparation was evaluated for a metallic material, Fe single crystal, using FIB-SEM-Ar triple beam system. While damaged layer decreased as FIB accelerating voltage went down, 1 kV Ar ion milling finally reduced the damaged layer down to about 3 nm.
Further details can be found on our membership website.
We would appreciate your joining.
About our membership site, see https://www.hitachi-hightech.com/global/en/support/sinavi/
|Related links (products)
|・Focused Ion Beam Systems (FIB)
・Transmission Electron Microscopes (TEM)
|Metals / Magnetic materials
|Technical Data / Data Sheet