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Title High quality lamella preparation of metal materials using triple beam® system
Details HTD-FIB-E035
Overview “High quality lamella preparation of metal materials using triple beam® system”

High quality lamella of Fe single crystal was prepared using FIB-SEM-Ar Triple Beam system. Optimizing the accelerating voltage and the incident angle of Ar ion milling, FIB-induced damage was drastically removed, and dislocations were clearly observed.

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Related links (products)
Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Metals / Magnetic materials
Information type Technical Data / Data Sheet
Issue date 2018/04/24
Inquiry Inquiry
No. HTD-FIB-E035