サイト名称 日立ハイテク

Title Automated Micro-Sampling (Auto-MS)
Details HTD-FIB-E037
Overview “Automated Micro-Sampling (Auto-MS)”

Processes of Micro-Sampling consisting of rough milling, micro sample pick up, and its mounting onto a grid are fully automated by Auto-MS (Automated Micro-Sampling). The positions of probe, sample and grid are automatically recognized and controlled to enhance operation efficiency.

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Related links (products)
Product type ・Focused Ion Beam Systems (FIB)
・Transmission Electron Microscopes (TEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2018/04/24
Inquiry Inquiry
No. HTD-FIB-E037