|High resolution imaging of plane surface of a 3D NAND Flash Memory with the FE-S
|“High resolution imaging of plane surface of a 3D NAND Flash Memory with the FE-SEM”
Mechanically polished surface of a 3D NAND Flash Memory was flattened by Ar ion milling and the orderly distribution of memory cells was observed with high resolution FE-SEM. Also, the concentric stack layers (SiN, Poly-Si and SiO layers) were clearly identified with good contrast.
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