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Title High resolution imaging of plane surface of a 3D NAND Flash Memory with the FE-S
Details HTD-SEM-E065
Overview “High resolution imaging of plane surface of a 3D NAND Flash Memory with the FE-SEM”

Mechanically polished surface of a 3D NAND Flash Memory was flattened by Ar ion milling and the orderly distribution of memory cells was observed with high resolution FE-SEM. Also, the concentric stack layers (SiN, Poly-Si and SiO layers) were clearly identified with good contrast.

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Product type ・Field Emission Scanning Electron Microscopes (FE-SEM)
・Sample Preparation Devices for TEM/SEM
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2018/04/19
Inquiry Inquiry
No. HTD-SEM-E065