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Title Detection of cathodoluminescence by Ultra Variable pressure Detector (UVD)
Details HTD-SEM-E069
Overview “Detection of cathodoluminescence by Ultra Variable pressure Detector (UVD) in high vacuum”

Cathodoluminescence (CL) image of crystal dislocations in gallium nitride was clearly observed using Ultra Variable pressure Detector (UVD, low vacuum secondary electron detector) under high vacuum. In addition to SE imaging under low vacuum, UVD allows high resolution CL imaging with high S/N ration under high vacuum.

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Related links (products)
Product type Field Emission Scanning Electron Microscopes (FE-SEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2018/04/25
Inquiry Inquiry
No. HTD-SEM-E069