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Title FIB fabrication and SEM observation at an assigned position using FIB-SEM and fo
Details HTD-FIB-E043
Overview FIB fabrication and SEM observation at an assigned position using FIB-SEM and foreign substance inspection

A defect identified by Review SEM was sectioned and observed on wafer FIB-SEM. Positional information was shared using KRF file and 200 mm stage precisely returned to the defect coordinate. Automated sequential FIB processing further allows analysis of multiple defects.

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Related links (products)
Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2018/11/12
Inquiry Inquiry
No. HTD-FIB-E043