| Overview |
“Analysis of a foreign particle inside a multilayer film”
 A foreign particle in a multilayer film was analyzed using Coherence Scanning Interferometry (CSI) and SEM-µXRF-EDS. Since the particle was not on the surface, it could not be recognized by SEM but by optical microscope and CSI. With the cross section image from CSI, the particle was located at the depth of over 100 μm. Though such deep region cannot be observed or analyzed by SEM-EDS, µXRF-EDS allowed the identification of the iron particle.
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