| Overview |
“SEM-SPM correlative imaging of multi-layer ceramic capacitor”
 Cross section of multi-layer ceramic capacitor was observed with SEM and SPM using correlative imaging technique. While positive electrode looked dark, negative electrode looked bright in SEM with applied voltage. Adjacent ceramic layers showed brightness gradient. Kelvin probe Force Microscope (KFM) image of the same field of view also showed bright and dark electrodes as well as electric potential gradient.
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