| Overview |
“TEM observation and EDX analysis of a 3DNAND flash memory in planar view“
 Plane view TEM/STEM of 3D NAND flash memory was performed on 200 kV FE-TEM. Ordered arrangement of circular memory cells was confirmed at low magnification. Concentric multi-layer was observed inside memory cell. STEM-EDX visualized elemental distribution of each layer including TiN and AlO of a few nm thickness.
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