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Title TEM observation and EDX analysis of a 3DNAND flash memory in planar view
Details HTD-TEM-E031
Overview “TEM observation and EDX analysis of a 3DNAND flash memory in planar view“

Plane view TEM/STEM of 3D NAND flash memory was performed on 200 kV FE-TEM. Ordered arrangement of circular memory cells was confirmed at low magnification. Concentric multi-layer was observed inside memory cell. STEM-EDX visualized elemental distribution of each layer including TiN and AlO of a few nm thickness.

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Related links (products)
Product type Transmission Electron Microscopes (TEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2019/06/06
Inquiry Inquiry
No. HTD-TEM-E031