Title	Planar TEM sample preparation of a 64 layer 3D NAND
Details	HTD-FIB-E066
Overview	Planar TEM sample preparation of a 64 layer 3D NAND
Related links (products)	Focused Ion and Electron Beam System Ethos NX5000 Series
Product type	Focused Ion Beam Systems (FIB)
Field 1	Materials science
Field 2	Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type	Technical Data / Data Sheet
Issue date	2019/11/11
Inquiry	Inquiry
No.	HTD-FIB-E066

Title

Planar TEM sample preparation of a 64 layer 3D NAND

Details

HTD-FIB-E066

Overview

Planar TEM sample preparation of a 64 layer 3D NAND

Related links (products)

Product type

Focused Ion Beam Systems (FIB)

Field 1

Materials science

Field 2

Semiconductors (incl. materials) / Devices / Components / Displays & Lighting

Information type

Technical Data / Data Sheet

Issue date

2019/11/11

Inquiry

No.

HTD-FIB-E066

Fields

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Applications：Planar TEM sample preparation of a 64 layer 3D NAND