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Title Comparison of sputtering yield on Si single crystal by Ar and Xe ion milling
Details HTD-FIB-E072
Overview Comparison of sputtering yield on Si single crystal by Ar and Xe ion milling
Related links (products)
Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2019/11/11
Inquiry Inquiry
No. HTD-FIB-E072