サイト名称 日立ハイテク

  • Top
  • App List
  • Cross sectional lamella preparation of a 64 layer
Title Cross sectional lamella preparation of a 64 layer 3D NAND
Details HTD-FIB-E073
Overview “Cross sectional lamella preparation of a 64 layer 3D NAND“

TEM lamella of 64-layer 3D NAND was prepared with uniform thickness. SiO and poly-Si at the center of channel holes were correctly observed in upper and lower regions of 5 μm deep cross section.

Further details can be found on our membership website with data library.
Looking forward to your joining.
About our membership site, see https://www.hitachi-hightech.com/global/en/support/sinavi/
Related links (products)
Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2019/11/11
Inquiry Inquiry
No. HTD-FIB-E073