|Crystal orientation measurement of 3D NAND flash memory using TKD method
|“Crystal orientation measurement of 3D NAND flash memory using TKD method“
Crystal orientation of FIB-prepared ultra-thin 3D NAND flash memory was determined at higher spatial resolution by TKD method. Band Contrast map and Phase map showed the shape and the size of crystal grains of poly-Si in circular memory cells and surrounding tungsten. Tungsten crystal grains were found ranging from 10 nm to 50 nm.
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