Title | Low acceleration voltage STEM observation and EDX analysis of a 14 nm FinFET |
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Details | HTD-SEM-E117 |
Overview | “Low acceleration voltage STEM observation and EDX analysis of a 14 nm FinFET“ Further details can be found on our membership website with data library. Looking forward to your joining. About our membership site, see https://www.hitachi-hightech.com/global/en/support/sinavi/ |
Related links (products) | |
Product type | ・Field Emission Scanning Electron Microscopes (FE-SEM) ・Focused Ion Beam Systems (FIB) |
Field 1 | Materials science |
Field 2 | Semiconductors (incl. materials) / Devices / Components / Displays & Lighting |
Information type | Technical Data / Data Sheet |
Issue date | 2019/11/12 |
Inquiry | Inquiry |
No. | HTD-SEM-E117 |