サイト名称 日立ハイテク

Title FE-SEM analysis of hard disk device
Details HTD-SEM-E129
Overview “FE-SEM analysis of hard disk device“

MR (Magneto Resistive) head was investigated using high resolution FE-SEM. Its multilayer structures including 4.2 nm metal layer in write head and 3.3 nm insulator layer in read element were observed. Defect in diamond-like carbon (DLC) protective layer was clearly visualized. Shape and size of magnetic particles on 3.5-inch disk were non-destructively evaluated at high magnification (1,000,000x).

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Product type Field Emission Scanning Electron Microscopes (FE-SEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2020/04/01
Inquiry Inquiry
No. HTD-SEM-E129