| Overview |
“FE-SEM analysis of hard disk device“
 MR (Magneto Resistive) head was investigated using high resolution FE-SEM. Its multilayer structures including 4.2 nm metal layer in write head and 3.3 nm insulator layer in read element were observed. Defect in diamond-like carbon (DLC) protective layer was clearly visualized. Shape and size of magnetic particles on 3.5-inch disk were non-destructively evaluated at high magnification (1,000,000x).
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