Title | Removal of Ga ion implanted layers on the Si lamella by Ar ion finishing |
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Details | HTD-FIB-E081 |
Overview | “Removal of Ga ion implanted layers on the Si lamella by Ar ion finishing“ Further details can be found on our membership website with data library. Looking forward to your joining. About our membership site, see https://www.hitachi-hightech.com/global/science/guide/ |
Related links (products) | |
Product type | Focused Ion Beam Systems (FIB) |
Field 1 | Materials science |
Field 2 | Semiconductors (incl. materials) / Devices / Components / Displays & Lighting |
Information type | Technical Data / Data Sheet |
Issue date | 2020/05/20 |
Inquiry | Inquiry |
No. | HTD-FIB-E081 |