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Title Crystal orientation analysis of a 3D NAND flash memory by precession electron
Details HTD-TEM-E039
Overview Crystal orientation analysis of a 3D NAND flash memory by precession electron diffraction

Crystal orientation of 3D NAND flash memory was analyzed by precession electron diffraction with high accuracy and high spatial resolution. Crystal orientation and grain size of polycrystalline silicon in the memory cell and surrounding polycrystalline tungsten are clearly visualized.

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Related links (products)
Product type Transmission Electron Microscopes (TEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2020/05/20
Inquiry Inquiry
No. HTD-TEM-E039