| Overview |
“Large area cross-sectioning of arbitrary sample position by combined process of the IM and FIB“
 Site-specific large area cross section of ceramic capacitor was prepared using BIB (Broad Ion Beam) milling and FIB without prior resin embedding or mechanical polishing. Over 1 mm wide cross section was prepared by BIB milling in 40 minutes and the redeposition was removed by additional FIB milling for 10 minutes. 330 μm square cross section was prepared in total 50 minutes.
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