| Overview |
“Improvement of the channeling contrast of multilayer ceramic capacitor using the triplebeamsystem“
 Cross section of multilayer ceramic capacitor (MLCC) was prepared by FIB and then processed by ArIon Beam (ArIB). While FIB prepared section shows blurry dielectric grain, ArIBprocessed one exhibits strong channeling contrast. FIB-induced damaged can be removed by ArIBintegrated in FIB-SEM-ArTriple Beam system without exposing the sample to air.
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