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Title Improvement of the channeling contrast of multilayer ceramic capacitor using
Details HTD-FIB-E086
Overview Improvement of the channeling contrast of multilayer ceramic capacitor using the triplebeamsystem

Cross section of multilayer ceramic capacitor (MLCC) was prepared by FIB and then processed by ArIon Beam (ArIB). While FIB prepared section shows blurry dielectric grain, ArIBprocessed one exhibits strong channeling contrast. FIB-induced damaged can be removed by ArIBintegrated in FIB-SEM-ArTriple Beam system without exposing the sample to air.

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Related links (products)
Product type Focused Ion Beam Systems (FIB)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2020/07/13
Inquiry Inquiry
No. HTD-FIB-E086