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Title Sequential multi-point cross-section ion millings of an electronic circuit board
Details HTD-SEM-E136
Overview Sequential multi-point cross-section ion millings of an electronic circuit board

Multiple cross sections were prepared by Broad Ion Beam milling system using “Milling Process Creator”,new function to allow high-throughput sequential processing under optimum conditions. 3 target regions were automatically processed at different accelerating voltages (7 kV, 6 kV, 8 kV and 2 kV) avoiding heat damage and ion damage in a much shorter time than processing whole area.

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Related links (products)
Product type ・Scanning Electron Microscopes (SEM)
・Sample Preparation Devices for TEM/SEM
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2020/08/04
Inquiry Inquiry
No. HTD-SEM-E136