| Overview |
”Introduction of automatic TEM lamella preparation by FIB process plus Ar ion beam finish”
 FIB processes for TEM sample prep from microsample extraction out of bulk sample to lamella thinning and eventually Ar ion beam finishing were automated using a FIB-SEM-Ar Triple Beam system. After Auto-Microsampling (in-situ lift out) and auto-thinning processes, Ar ion beam was automatically irradiated to reduce FIB-induced damage to realize unattended TEM lamella preparation.
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