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Title Automatic measurements of 3D NAND memory holes using terminal PC software
Details HTD-STEM-E037
Overview ”Automatic measurements of 3D NAND memory holes using terminal PC software”

Automatic highly accurate CD measurement using Hitachi High-Tech’s unique algorithm based on a CD-SEM can be applied to TEM/STEM images. The memory hole diameter of the 3D NAND was measured. The center and edge of each memory hole were accurately detected. The result of major axis, minor axis, average value, and 3σ can be displayed at the same time.

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Related links (products)
Product type Transmission Electron Microscopes (TEM)
Field 1 Materials science
Field 2 Semiconductors (incl. materials) / Devices / Components / Displays & Lighting
Information type Technical Data / Data Sheet
Issue date 2022/11/21
Inquiry Inquiry
No. HTD-STEM-E037