| Overview |
”Elemental mapping of 3D NAND device multi-layered structure by EFTEM”
 A plan-view TEM sample of a 3D NAND device was prepared by FIB and observed by Energy-Filtered Transmission Electron Microscopy (EFTEM). The TEM and zero-loss energy-filtered images showed multi-layered structure of crystalline and amorphous layers. The elemental distribution map clearly visualized the SiON-SiN-SiO-AlO-TiN layers on the periphery of the Poly-Si layer.
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