| Overview |
”TEM observation and EDX analysis of a DRAM capacitor in planar view”
 A plan view TEM lamella of DRAM capacitors was prepared using FIB-SEM. Ordered arrangement of circular capacitors and their concentric multilayer (several nm thick each) were observed by TEM. ADF-STEM images and EDX maps clearly visualized the distribution of SiGe, SiO2, TiN, Al2O3, and ZrO2 in the multilayer.
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