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Schottky Field Emission Scanning Electron Microscope SU5000

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Innovative analytical FE-SEM allows for a simple transition between high vacuum and variable pressure mode. EM Wizard is a knowledge-based system for SEM imaging that goes beyond basic preset conditions and recipes. Its ease of use opens a new gateway for material research, development, and area beyond our imagination.

 

Overview


Watch this 6-min video and see how the SU5000 and
EM Wizard work together!

The SU5000 FE-SEM has forever changed SEM operations. Ground-breaking computer-assisted technology from Hitachi, referred to as the EM Wizard, offers a new level of SEM operation and control. Expert or novice, the result is now the same: Highest quality nano-scale images at everyone's fingertips!

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Features

  • A novel, revolutionary user interface, EM Wizard, provides all users with optimum levels of resolution, repeatability, and throughput. With EM Wizard, beginners become experts overnight.
  • Automatic axis adjustment technology (auto-calibration) restores the microscope to its "best condition" on demand.
  • A robust "draw-out" specimen chamber accommodates large specimens (-200 mmφ, -80 mmH).
  • Rapid sample exchange with evacuation to observation in 3 minutes or less.
  • Automated, intuitive on-demand image optimization on the fly.
  • A visual and interactive guide offers 'pick and choose' SEM modes to ensure best operating conditions.
  • With the 3D MultiFinder tool, samples are easily tilted and rotated with the image remaining centered and in focus.

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With 3D MultiFinder, the sample can be rotated and tilted,
and the image and field of view remain centered and in focus.

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The interactive guide enables a 'pick and choose' imaging mode.
EM Wizard optimizes the image for you.

Application data

Life Sciences

Frontal Cortex of Rat

2 kV BSE image (thin section)
2 kV BSE image (thin section)

Specimen courtesy of Professor Kubota, NIPS, Japan

Rat Dorsal Root Ganglion Neuron

5 kV SE image
5 kV SE image

Specimen courtesy of
Dr. Ushiki and Dr. Koga(*), Niigata University

*:
Asahikawa Medical University

Materials Science

Multi-Walled Carbon Nanotube Outer Structure

Acquired at 500 V of landing energy, Mag=200kX .
Acquired at 500 V of landing energy, Mag=200kX .

Neodymium Magnet

2 kV, BSE images
2 kV, BSE images

Multiple angle information from a newly developed annular Backscatter Electron Detector (BSD) acquires both topographic and compositional information simultaneously.

Specimen courtesy of Daido Steel.

In-situ Imaging and the Use of a Heating Stage in the Specimen Chamber

Specimen: Gold thin film on quartz substrate
HV=10 kV

Specimen courtesy of Dr. Yoshino and Dr. Terano, Tokyo institute of technology

3D analysis ; Lithium Ion Battery Material


FOV : 350 µm × 90 µm

3D re-constructed image of active material (orange) and PvdF (blue) distribution.

Semiconductors

Images of Atomic Step and Threading Dislocation of n-GaN on Si


HV=15 kV, BSE images

Specimen courtesy of Professor Egawa,
Research Center for Nano-Device and System
Nagoya Institute of technology, Japan

 

Product-related information