Features
Pre-mounted cantilevers make replacement EASY(option)
Automated measurement & analysis with one-click autopilot function
Correlative SEM-EDS Analysis with our AFM Marking Function
Analyze the same region of interest (ROI) with SEM, EDS, and AFM: More Information = Better Results!
・Automated AFM Marking Features with Navigation Software.

※SÆMic. is a generic term for SEM-AFM correlative analysis recommended by Hitachi High-Tech.
[Evaluating AFM-KFM-SEM-EDS of Aluminum Alloy before and after Corrosion]